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Atomic Layer Deposition Equipment

Atomic Layer Deposition Equipment

Place of Origin:
Vietnam
Min. Order:
Contact for details
Delivery time:
Contact for details
Main market:
Vietnam, International

Contact infomation

Contact name: Mr. Ngoc (Eng/Vie)
Mobiphone:+84 988 248 567

Product & service detail

ATOMIC LAYER DEPOSITION EQUIPMENT
 
1. Outline
 
- ALD (Atomic Layer Deposition) forms a thin film by repeating cycles of the Atomic Layer Deposition method that forms a single atomic layer in one cycle.
Enabling uniform layer control at an atomic layer level can form a thin film with high quality as well as high step-coverage.
- Application film type : SiO2, TiO2, Al2O3
 
2. Main specifications
 
- 25 pieces of φ4 inch substrates /1 batch
- Rotary mechanism of substrate
- Temperature of substrate heating: 25 to 120 degree C
 
3. Features
 
- Excellent film thickness controllability based on single atomic layer-by-layer formation.
- Able to form a film with excellent uniform coverage even for a high aspect-ratio substrate.
- Able to form a film with substrate temperature rise suppressed.
- Excellent film distribution within the substrate surface.
 
4. Application
 
- LED (Chroma adjustment, Ag sulfide preventing film)
- Electronic devices (insulation film, barrier metal)
- Gas barrier film and vapor barrier film
- Film formation on complex-shaped substrates
 

 

Please contact us for more information. We are honored to serve you!

Representative Office of ULVAC in Vietnam

Representative Office of ULVAC in Vietnam
Address:
29/11/100 Le Duc Tho Street, Ward 7, Go Vap District,Ho Chi Minh City, Vietnam
Telephone:
+84 28 38212367, Hotline: +84 988 248 567

Contact Infomation
What can we do for you?
Contact name: Mr. Ngoc (Eng/Vie)
Mobiphone: +84 988 248 567
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Mobiphone: +84 914 261 828
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VIETNAM YELLOW PAGES - VIETNAM BUSINESS DIRECTORY
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Content manager: Phung Thi Tuyet Mai
Head Office: 222B Giap Bat St., Giap Bat Ward, Hoang Mai Dist., Hanoi, Vietnam
Head Office: Floor 6, Vinafood 1 Building, 94 Luong Yen St., Bach Dang Ward, Hai Ba Trung Dist, Hanoi, Vietnam
Branch: 4th Floor, Bach Viet Building, 65 Tran Quoc Hoan Street, Ward 4, Tan Binh District, Ho Chi Minh City, Vietnam
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